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Stínící efekt oxidové izolační vrstvy na povrchový potenciál měřený pomocí Kelvinovy sondové mikroskopie / Shielding Effect of Oxide Isolating Layer on Surface Potential Measured by Kelvin Probe Force Microscopy

The diploma thesis deals with the experimental study of shielding effect of oxide isolating layer on surface potential measured by Kelvin Probe Force Microscopy. For the study of surface potential were created Au/SiO2 based nanostructures by Electron Beam Lithography, Atomic Layer Deposition and Multilayer Deposition. Surface potential was measured depending on the relative humidity and thickness of oxide isolating layer.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:231956
Date January 2015
CreatorsŠvarc, Vojtěch
ContributorsPálesch, Erik, Bartošík, Miroslav
PublisherVysoké učení technické v Brně. Fakulta strojního inženýrství
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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