Microstructure and electrical performance of sputter-deposited Hafnium oxide (HfO₂) thin films

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Thesis (M.S.)--University of Texas at El Paso, 2009. / Title from title screen. Vita. CD-ROM. Includes bibliographical references. Also available online.

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Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/608258049
Date	January 2009
Creators	Aguirre, Brandon A.,
Source Sets	OCLC
Language	English
Detected Language	English
Source	To access this resource online via ProQuest Dissertations and Theses @ UTEP