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Embedding hafnium oxide based FeFETs in the memory landscape

During the last decade ferroelectrics based on doped hafnium oxide emerged as promising candidates for realization of ultra-low-power non-volatile memories. Two spontaneous polarization states occurring in the material that can be altered by applying electrical fields rather than forcing a current through and the materials compatibility to CMOS processing are the main benefits setting the concept apart from other emerging memories. 1T1C ferroelectric random access memories (FeRAM) as well as 1T FeFET concepts are under investigation. In this article the application of hafnium based ferroelectric memories in different flavours and their ranking in the memory landscape are discussed.

Identiferoai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:76933
Date09 December 2021
CreatorsSlesazeck, Stefan, Schroeder, Uwe, Mikolajick, Thomas
PublisherIEEE
Source SetsHochschulschriftenserver (HSSS) der SLUB Dresden
LanguageEnglish
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/acceptedVersion, doc-type:conferenceObject, info:eu-repo/semantics/conferenceObject, doc-type:Text
Rightsinfo:eu-repo/semantics/openAccess
Relation978-1-5386-2550-7, 10.1109/ICICDT.2018.8399771

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