In the semiconductor industry the reliability of devices is of paramount importance. Therefore, after removing the defective ones, one wants to detect irregularities in measurement data because corresponding devices have a higher risk of failure early in the product lifetime. The paper presents a method to improve the detection of such suspicious devices where the screening is made on transformed measurement data. Thereby, e.g., dependencies between tests can be taken into account. Additionally, a new dimensionality reduction is performed within the transformation, so that the reduced and transformed data comprises only the informative content from the raw data. This simplifies the complexity of the subsequent screening steps. The new approach will be applied to semiconductor measurement data and it will be shown, by means of examples, how the screening can be improved.
| Identifer | oai:union.ndltd.org:DRESDEN/oai:qucosa:de:qucosa:35129 |
| Date | 22 August 2019 |
| Creators | Bartholomäus, Jenny, Wunderlich, Sven, Sasvári, Zoltán |
| Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
| Source Sets | Hochschulschriftenserver (HSSS) der SLUB Dresden |
| Language | English |
| Detected Language | English |
| Type | doc-type:conferenceObject, info:eu-repo/semantics/conferenceObject, doc-type:Text |
| Rights | info:eu-repo/semantics/openAccess |
| Relation | 978-1-5386-7601-1, 2376-6697, 10.1109/ASMC.2019.8791825, info:eu-repo/grantAgreement/Electronic Components and Systems for European Leadership JU/H2020/737459//Electronics and ICT as enabler for digital industry and optimized supply chain management covering the entire product lifecycle/Productive4.0 |
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