An accurate, intuitive and tractable transform as been identified and developed from which the spatial harmonics of reticle patterns defined in polar coordinates can be obtained. A description of reticles and generic methods for describing them mathematically are presented along with some background on general harmonic analysis. Focus then turns to candidate transforms for analysis of reticle patterns and the most promising are investigated in more detail. A fast linear algorithm is devised to overcome some problems with implementation of a fast transform and this is followed by analysis of the transform basis functions to assist with interpretation of the transform in azimuth and radius. A sampling guideline is presented so that aliasing can be avoided and, finally, the transforms of some representative reticle patterns are shown along with some insight into their interpretation. / Thesis (MSc(AppliedPhysics))--University of South Australia, 2005.
| Identifer | oai:union.ndltd.org:ADTP/267514 |
| Creators | Legg, Matthew. |
| Source Sets | Australiasian Digital Theses Program |
| Language | English |
| Detected Language | English |
| Rights | copyright under review |
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