In this thesis we study the interaction of helium, neon, argon and gallium ions with graphene. The graphene structure is contaminated with gallium ions during the graphene processing by focused gallium beam (FIB). The graphene properties are affected, e.g. reducing the electrical conductivity. The aim of this thesis is to verify the effect of selected ion beams on the graphene structure and select suitable ion beam for sputtering. Furthermore, the modification of standard heating stage used in LEIS instrument (Qtac 100) was designed and implemented. The LEIS instrument is connected to the complex UHV system for deposition and analysis of nanostructures – SPECS. This modification allows analysis of selected nanoparticles on suitable substrate at the elevated temperature.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:402556 |
| Date | January 2019 |
| Creators | Chmelický, Martin |
| Contributors | Caha, Ondřej, Průša, Stanislav |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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