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Epitaxial growth of oxide thin films.

Ling Siu-hing. / Title also in Chinese characters. / Thesis (Ph.D.)--Chinese University of Hong Kong, 1994. / Includes bibliographical references (leaves 220-227). / ACKNOWLEDGEMENT --- p.i / ABSTRACT --- p.ii / Chapter Chapter 1 --- Ceramic thin film --- p.1 / Chapter 1. 1 --- """New stone era""---the importance of ceramics" --- p.1 / Chapter 1.2 --- The importance of epitaxial growth of YBCO films --- p.4 / Chapter 1.3 --- The importance of epitaxial growth of PZT films --- p.9 / Chapter 1.4 --- The similar structures of YBCO and PZT --- p.10 / Chapter Chapter 2 --- Epitaxy --- p.12 / Chapter 2. 1 --- Introduction --- p.12 / Chapter 2.2 --- Basic principle --- p.13 / Chapter Chapter 3 --- Sample preparation Techniques --- p.25 / Chapter 3.1 --- A glimpse at epitaxial film deposition --- p.25 / Chapter 3.2 --- Magnetron sputtering --- p.28 / Chapter 3.2.1 --- Principle --- p.28 / Chapter 3.2.2 --- Set-ups --- p.30 / Chapter 3.2.3 --- High pressure magnetron sputter gun --- p.33 / Chapter 3.2.4 --- Type II unbalanced magnetron gun modification --- p.42 / Chapter 3.3 --- Pulsed Laser Deposition (PLD) --- p.54 / Chapter 3.4 --- Rapid thermal annealing (RTA) --- p.62 / Chapter Chapter 4 --- Characterizations-principles and setups --- p.66 / Chapter 4.1 --- Structure-X-ray diffractometer --- p.66 / Chapter 4.1.1 --- Setup --- p.57 / Chapter 4.1.2 --- Characterization --- p.71 / Chapter 4.1.3 --- High temperature X-ray diffractometer (HTXRD) --- p.83 / Chapter 4.2 --- Surface morphology --- p.86 / Chapter 4.2.1 --- Scanning electron microscopy (SEM) --- p.86 / Chapter 4. 3 --- Composition --- p.89 / Chapter 4.3.1 --- Energy dispersive X-ray spectroscopy --- p.89 / Chapter 4.3.2 --- Rutherford backscattering spectrometry (RBS) --- p.91 / Chapter 4.4 --- Other characterization techniques --- p.93 / Chapter 4.4.1 --- Thickness measurement --- p.93 / Chapter 4.4.2 --- Measurement of Tc in YBCO --- p.93 / Chapter 4.4.3 --- Thermomechanical analysis system (TMS) --- p.95 / Chapter 4.4.4 --- Differential scanning calorimeter (DSC) --- p.98 / Chapter Chapter 5 --- Epitaxial films --- p.99 / Chapter 5. 1 --- YBCO films --- p.99 / Chapter 5.1.1 --- YBCO on sapphire --- p.99 / Chapter 5.1.2 --- YBCO on spinel (MgAl2O4) --- p.115 / Chapter 5.1.3 --- YBC0//SrTi〇3//spinel --- p.130 / Chapter 5.1.4. --- YBCO on Mg〇 --- p.134 / Chapter 5.1.5 --- YBCO on SrTi〇3(110) --- p.143 / Chapter 5.2 --- PZT films --- p.182 / Chapter 5.2.1 --- PZT on MgO --- p.182 / Chapter 5.2.2 --- PZT on spinel --- p.188 / Chapter 5.2.3 --- High temperature structural transition of PZT films --- p.195 / Chapter Chapter 6 --- Conclusion --- p.218 / REFERENCES --- p.220

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_318230
Date January 1994
ContributorsLing, Siu-hing., Chinese University of Hong Kong Graduate School. Division of Physics.
PublisherChinese University of Hong Kong
Source SetsThe Chinese University of Hong Kong
LanguageEnglish
Detected LanguageEnglish
TypeText, bibliography
Formatprint, v, 227 leaves : ill. ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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