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Presputtering effect in deposition of YBa2Cu3O7 thin films by magnetron sputtering techniques.

by Sou Ka Hou. / On t.p. "2', "3", and "T" are subscript following "deposition of" in the title. / Parallel title in Chinese characters. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1992. / Includes bibliographical references (leaves [88]). / Chapter 1. --- Introduction --- p.1 / Chapter 2. --- Computer-controlled sputtering system for deposition of high Tc thin films --- p.10 / Chapter 2.1 --- Introduction --- p.10 / Chapter 2.2 --- Vacuum system --- p.12 / Chapter 2.3 --- Gas flow control --- p.16 / Chapter 2.3.1 --- Design --- p.16 / Chapter 2.3.2 --- Flow control --- p.18 / Chapter 2.4 --- Gas pressure control --- p.21 / Chapter 2.4.1 --- Gauges --- p.21 / Chapter 2.4.2 --- Control method --- p.21 / Chapter 2.5 --- "Sputtering, guns and deposition control" --- p.24 / Chapter 2.5.1 --- Types --- p.24 / Chapter 2.5.2 --- Orientation of the sputter gun --- p.26 / Chapter 2.5.3 --- Dual magnetron gun system --- p.26 / Chapter 2.5.4 --- Deposition control system --- p.27 / Chapter 2.6 --- Substrate holder and temperature control --- p.30 / Chapter 2.6.1 --- Substrate holder --- p.30 / Chapter 2.6.2 --- Substrate temperature control --- p.31 / Chapter 2.7 --- Interlock protection --- p.34 / Chapter 2.8 --- Control program --- p.35 / Chapter 3. --- The presputtering effect --- p.39 / Chapter 3.1 --- Presputtering effect (a review) --- p.39 / Chapter 3.2 --- Emission spectroscopy on sputtered materials --- p.48 / Chapter 3.3 --- Experimental --- p.49 / Chapter 3.4 --- Emission spectra --- p.53 / Chapter 3.4.1 --- Effect of sputter power source --- p.53 / Chapter 3.4.2 --- Effect of gas ratio --- p.58 / Chapter 3.4.3 --- Effect of gas pressure --- p.64 / Chapter 3.4.4 --- Study of presputtering effect --- p.67 / Chapter 3.4.5 --- Monitoring the evaporation rate by the spectral line intensities --- p.71 / Chapter 4. --- Conclusion and discussion --- p.75 / Chapter Appendix A. --- Motor control --- p.77 / Chapter Appendix B. --- Thin film deposition --- p.82

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_319030
Date January 1992
ContributorsSou, Ka Hou., Chinese University of Hong Kong Graduate School. Division of Physics.
PublisherChinese University of Hong Kong
Source SetsThe Chinese University of Hong Kong
LanguageEnglish
Detected LanguageEnglish
TypeText, bibliography
Formatprint, [4], 87, [1] leaves : ill. ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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