A primarily software based Fourier Deep Level Transient Spectroscope
(FDLTS) is built. The raw capacitance transient is acquired and digitized using
capacitance meter HP4280A whereas the signal analysis is done using a customized
software module. The software module calculates both the conventional DLTS spectrum
and the Fourier DLTS spectrum. This home-made FDLTS set up was compared
to a commercial conventional box-car DLTS system (Sula Technology's DLTS)
as well as to a commercial Fourier DLTS system (Bio-rad) and it was found to be
either equivalent to the commercial systems or even better in some respects. In one
case, Fourier analysis using the home-made setup, led to the detection of a trap
completely undetected by the commercial conventional DLTS. The FDLTS system
together with the commercial conventional DLTS were used to study possible gold
contamination in an industrial process. The study was accomplished by comparing
conventional and Fourier DLTS spectra and corresponding calculated trap properties
using Schottky barrier diodes fabricated on the suspect wafers and an intentionally
gold diffused reference sample wafer. During the investigation minority carrier emission
in DLTS using Schottky barrier diodes was observed. The study revealed the
presence of some possible gold-like contamination which trapped minority carriers
(i.e. electrons) in p type silicon. / Graduation date: 2003
| Identifer | oai:union.ndltd.org:ORGSU/oai:ir.library.oregonstate.edu:1957/31712 |
| Date | 03 July 2002 |
| Creators | Divekar, Prasad K. |
| Contributors | Subramanian, S. |
| Source Sets | Oregon State University |
| Language | en_US |
| Detected Language | English |
| Type | Thesis/Dissertation |
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