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The Effect of Bias Voltage and External Magnetic Field on Transport Processes of a Two-Dimensional Plasma

This study uses the MHD (Magnetohydrodynamics) model to simulate unsteady two-dimensional transport variables in helium plasma under low pressure between two infinite planar electrodes suddenly biased by a negative voltage. Plasma has been widely used in etching, ion implantation, light source, and encountered in nuclear fusion, etc. Studying transport processes of plasmas therefore is important. By account for momentum exchange collisions, electric fields and magnetic fields the computed results in this work quantitatively show density, velocity, electric potential, temperature, viscosity, thermal conductivity of the ions and electrons across the sheath to the surfaces suddenly biased by a dc negative voltage.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0808111-124522
Date08 August 2011
CreatorsTsai, Sheng-You
ContributorsFei-Bin Hsiao, Jiin-Yuh Jang, Peng-Sheng Wei, Long-Jeng Chen
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0808111-124522
Rightsuser_define, Copyright information available at source archive

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