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The use of electron beam lithography and chemical etching for the fabrication of micromechanical structures

No description available.
Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:239063
Date January 1991
CreatorsLutwyche, Mark Ian
PublisherUniversity of Cambridge
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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