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Materials and methods for nanolithography using scanning thermal cantilever probes

Thesis (Ph. D.)--Chemical and Biomolecular Engineering, Georgia Institute of Technology, 2008. / Committee Chair: Henderson, Clifford; Committee Member: Hess, Dennis; Committee Member: King, William; Committee Member: Lu, Hang; Committee Member: Tolbert, Laren.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/268952934
Date January 2008
CreatorsHua, Yueming.
PublisherAtlanta, Ga. : Georgia Institute of Technology,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology:

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