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Optical detection of multiple faults of a MEMS based linear comb resonator

Thesis (M.S.)--West Virginia University, 2005. / Title from document title page. Document formatted into pages; contains xi, 84 p. : ill. (some col.). Includes abstract. Includes bibliographical references (p. 81-84).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/63676947
Date January 2005
CreatorsKonduparthi, Lakshmi Deepasree.
PublisherMorgantown, W. Va. : [West Virginia University Libraries],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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