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3-D time-depending simulation of void formation in metallization structures

Hannover, University, Diss., 2003.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/76555182
Date January 2003
CreatorsDalleau, Dea-Dess David.
Publisher[S.l. : s.n.],
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceLF

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