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Development of a modular interferometric microscopy system for characterization of MEMS

Thesis (M.S.)--Worcester Polytechnic Institute. / Keywords: vacuum; shape and deformation measurement; MEMS; vibrometry; scanning white light; Interferometry; thermal; vibration. Includes bibliographical references (136-139 leaves ).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/86083611
Date January 2007
CreatorsKlempner, Adam R.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceLink to electronic thesis

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