A theoretical and experimental study of liquid metal ion sources and their application to focused ion beam technology /

Description

Thesis (Ph. D.)--Oregon Graduate Center, 1988.

Links & Downloads

1. http://content.ohsu.edu/u?/etd,182

Tags

Gallium. Ion beam lithography.

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/19479573
Date	January 1988
Creators	Puretz, Joseph,
Source Sets	OCLC
Language	English
Detected Language	English
Source	Full text open access at: