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Doping effect of a-Si thin films by ion implantation.

by Cheung-Yin Tang. / Title also in Chinese. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1991. / Bibliography: leaves 83-84. / ACKNOWLEDGEMENTS --- p.i / TABLE OF CONTENTS --- p.ii / ABSTRACT --- p.iv / Chapter Chapter 1 - --- Introduction --- p.1 / Chapter 1.1 --- Structure --- p.2 / Chapter 1.1.1 --- Physical Structure --- p.2 / Chapter 1.1.2 --- Electronic Structure --- p.3 / Chapter 1.2 --- Hydrogenation --- p.9 / Chapter 1.2.1 --- Hydrogenation during film formation --- p.10 / Chapter 1.2.2 --- Posthydrogenation --- p.10 / Chapter 1.3 --- Doping of a-Si --- p.11 / Chapter 1.4 --- Previous Results and Applications --- p.13 / Chapter 1.4.1 --- Results --- p.13 / Chapter 1.4.2 --- Applications --- p.24 / Chapter Chapter 2 - --- Experimental Set-up and Techniques --- p.25 / Chapter 2.1 --- Sample Preparation --- p.25 / Chapter 2.1.1 --- Substrate cleaning procedure --- p.25 / Chapter 2.1.2 --- Deposition Method --- p.26 / Chapter 2.1.3 --- Annealing Method --- p.30 / Chapter 2.1.4 --- Hydrogenation Method --- p.31 / Chapter 2.1.5 --- Doping Method --- p.33 / Chapter 2.2 --- Measurements --- p.34 / Chapter 2.2.1 --- Dark Conductivity --- p.34 / Chapter 2.2.2 --- Room Temperature Photo-conductivity --- p.39 / Chapter 2.2.3 --- ESR (Electron Spin Resonance) --- p.39 / Chapter Chapter 3 - --- Results and Discussions --- p.41 / Chapter 3.1 --- Doping effect and posthydrogenation --- p.42 / Chapter 3.2 --- Annealing of the doped films --- p.44 / Chapter 3.3 --- Implantation at different dose levels --- p.46 / Chapter Chapter 4 - --- Conclusions --- p.82 / REFERENCES --- p.83 / APPENDIX --- p.85

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_318791
Date January 1991
ContributorsTang, Cheung-Yin., Chinese University of Hong Kong Graduate School. Division of Physics.
PublisherChinese University of Hong Kong
Source SetsThe Chinese University of Hong Kong
LanguageEnglish
Detected LanguageEnglish
TypeText, bibliography
Formatprint, iv, 85 leaves : ill. ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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