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Simulation of defect nucleation with low energy amorphizing silicon and germanium implants

Thesis (M.S.)--University of Florida, 2004. / Title from title page of source document. Document formatted into pages; contains 132 pages. Includes vita. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/56813858
Date January 2004
CreatorsBellarmine, P. Xavier.
Publisher[Gainesville, Fla.] : University of Florida,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish

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