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Development of an integrated organic film removal and surface conditioning process using low molecular weight alcohols for advanced Integrated Circuit (IC) fabrication

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1. http://hdl.handle.net/1853/11255
2. 590702

Identifer	oai:union.ndltd.org:GATECH/oai:smartech.gatech.edu:1853/11255
Date	12 1900
Creators	Kamal, Tazrien
Publisher	Georgia Institute of Technology
Source Sets	Georgia Tech Electronic Thesis and Dissertation Archive
Language	en_US
Detected Language	English
Type	Dissertation
Format	238 bytes, text/html
Rights	Access restricted to authorized Georgia Tech users only.