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Kontrast v obraze získaném pomocí scintilačního detektoru sekundárních elektronů ve VP SEM / Contrast in image aquired by scintillation SE detector for VP SEM

First part of this thesis is a theoretical essay which deals with the basics of scanning electron microscopy, with structure and function of a scanning electron microscope, its’ special case of an various pressure scanning electron microscope, electron interaction with surrounding environment and with a scintillation detector. The applied part of the thesis is focused on evaluation of material contrast on Cu-W specimen. Material contrast is evaluated for different pressures of water vapors in the microscope specimen chamber and for different detection conditions.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:219044
Date January 2011
CreatorsKoudela, Oldřich
ContributorsŠpinka, Jiří, Jirák, Josef
PublisherVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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