In this thesis, the a-PMT (amorphous lead magnesium titanate) membranes have been prepared by sol-gel technique as H+ ion sensitive layers. The C-V measurements of the a-PMT/SiO2/Si EIS structures prepared by spin-on coating are used for examining the fabrication parameters and sensing properties. There exhibits the quasi-Nerstain response of 55¡V59 mV/pH in the range of pH 2¡V12, fabricated with the Mg-modified content of 4 mole%, the firing temperature of about 400 ¢J and the thickness of about 0.5
Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0704101-231430 |
Date | 04 July 2001 |
Creators | Jan, Pei-Jane |
Contributors | Ying-Chung Chen, Jung-Chuan Chou, Man-Phon Houng, Nan-Chung Wu, Houng-Mo Duh |
Publisher | NSYSU |
Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
Language | Cholon |
Detected Language | English |
Type | text |
Format | application/pdf |
Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0704101-231430 |
Rights | unrestricted, Copyright information available at source archive |
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