Process development for the fabrication of suspended membrane with nanoscale through vias on a silicon substrate /

Description

Thesis (M.Phil.)--Hong Kong University of Science and Technology, 2009. / Includes bibliographical references (p. 75-81).

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1. http://library.ust.hk/cgi/db/thesis.pl?MECH%202009%20LAU

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Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/403203226
Date	January 2009
Creators	Lau, Chi Ho.
Source Sets	OCLC
Language	English
Detected Language	English
Source	View abstract or full-text.