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Laser beam interaction with materials for microscale applications

Dissertation (Ph.D.)--Worcester Polytechnic Institute. / Keywords: laser beam characteristics; heat transfer; hole profile; MEMS; hole formation; laser micromachining; laser microdrilling; plasma effects; silicon; 304 stainless steel; Fourier theory; lattice-phonon vibration. Includes bibliographical references. (p.379-390)

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/63518494
Date January 2005
CreatorsNowakowski, Krzysztof A.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceLink to electronic thesis

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