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Development of new thickness measurement system with high lateral resolution

In this thesis, with external cavity semiconductor laser, a high lateral resolution thickness measurement is proposed and demonstrated. The approach is typical an intra-cavity measurement of focused cell thickness by wavelength tuning of an external cavity laser diode. In addition, using blue light of 406nm as laser diode, higher lateral resolution is also observed. Using the proposed thickness method, the lateral resolution and longitudinal resolution have been demonstrated with 20£gm and 0.15£gm, respectively. We also discuss the feasibility of £gm scaled lateral resolution through improvement of laser diode, such as M^2~1.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0717112-175258
Date17 July 2012
CreatorsHo, Ji-Bin
ContributorsAnn-Kuo Chu, Chao-Kuei Lee, Yi-Jen Chiu, Wei-Hung Su
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0717112-175258
Rightsuser_define, Copyright information available at source archive

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