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Development of inorganic resists for electron beam lithography novel materials and simulations /

Thesis (Ph. D.)--School of Chemical and Biomolecular Engineering, Georgia Institute of Technology, 2005. Directed by Clifford L. Henderson. / Brent Carter, Committee Member ; Clifford L. Henderson, Committee Chair ; Dennis Hess, Committee Member ; Peter Ludovice, Committee Member ; Kevin Martin, Committee Member. Vita. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/56569019
Date January 2004
CreatorsJeyakumar, Augustin.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology, 2004:

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