The main goal of this work is to introduce with the basic technologies of manufacturing MEMS (Micro-electro-mechanical-systems). Further there is mentioned properties and manufacturing of CNT (Carbon nanotubes), used in manufacturing of capacitance pressure sensor.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:217234 |
| Date | January 2008 |
| Creators | Šeda, Miroslav |
| Contributors | Musil, Vladislav, Ficek, Richard |
| Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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