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Diagnostics and modelling of an inductively coupled RF low-pressure low-temperature plasma.

Thesis (PhD)-Open University. BLDSC no.DXN020071.

  1. http://oro.open.ac.uk/19841/
Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/617495157
Date January 1998
CreatorsYang, Suidong.
Publishern.p.,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceFull text via Open Research Online repository

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