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Measurement and modeling of fluid pressures in chemical mechanical polishing

Thesis (Ph. D.)--Mechanical Engineering, Georgia Institute of Technology, 2005. / Steven Danyluk, Committee Chair ; Richard Salant, Committee Member ; Jeffrey Streator, Committee Member ; Michael Sacks, Committee Member ; Dennis Hess, Committee Member ; Leonard Borucki, Committee Member. Includes bibliographical references.

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/60766665
Date January 2005
CreatorsNg, Sum Huan.
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceAvailable online, Georgia Institute of Technology, 2005.

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