This thesis presents design, modeling, and fabrication of an RF MEMS
adjustable impedance matching network. The device employs the basic triple stub
matching technique for impedance matching. It has three adjustable length stubs
which are implemented using capacitively loaded coplanar waveguides. The
capacitive loading of the stubs are realized using the MEMS switches which are
evenly distributed over the stubs. There are 40 MEMS bridges on each stub whichare separated with & / #955 / /40 spacing making a total of 120 MEMS switches in the
structure. The variability of the stub length is accomplished by closing the MEMS
switch nearest to the required stub length, and making a virtual short circuit to
ground. The device is theoretically capable of doing matching to every point on
the Smith chart.
The device is built on coplanar waveguide transmission lines. It has a
center operating frequency of 10GHz, but because of its adjustability property it is
expected to work in 1-40GHz range. It has dimensions of 8950 × / 5720µ / m2.
This work is the continuation of the first national work on fabrication of
RF MEMS devices. The device in this work is fabricated using the surface
micromachining technology in the microelectronic facilities of Middle East
Technical University.
| Identifer | oai:union.ndltd.org:METU/oai:etd.lib.metu.edu.tr:http://etd.lib.metu.edu.tr/upload/1124676/index.pdf |
| Date | 01 January 2003 |
| Creators | Unlu, Mehmet |
| Contributors | Demir, Simsek |
| Publisher | METU |
| Source Sets | Middle East Technical Univ. |
| Language | English |
| Detected Language | English |
| Type | M.S. Thesis |
| Format | text/pdf |
| Rights | To liberate the content for public access |
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