Polycrystalline films are used in a wide array of micro- and nano-scale devices, for electronic, mechanical, magnetic, photonic and chemical functions. Increasingly, the properties, performance, and reliability of films in these systems depend on nano-scale structure. In collaborative research with a number of SMA Fellows, Associates, and students, our group is carrying out research focused on probing, modeling and controlling nano-scale structural evolution during both vapor-phase and solid-phase polycrystalline film formation. In particular, high-sensitivity in-situ and real-time stress measurements are being used to study atomic scale forces and to characterize structure formation and evolution at the nano-scale. In other collaborative research, the affects of controlled structure and multi-film architectures on properties, such as piezoelectric characteristics and electromigration-limited reliability, are being explored. Through these interrelated activities, basic principles of the science and engineering of nano-scale materials are emerging. / Singapore-MIT Alliance (SMA)
| Identifer | oai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/3670 |
| Date | 01 1900 |
| Creators | Thompson, Carl V. |
| Source Sets | M.I.T. Theses and Dissertation |
| Language | en_US |
| Detected Language | English |
| Type | Article |
| Format | 315579 bytes, application/pdf |
| Relation | Advanced Materials for Micro- and Nano-Systems (AMMNS); |
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