An analog controller has been analyzed and built for an electrostatic micro-cantilever
beam. The closed loop MEMS device can be used as both actuator and sensor. As an
actuator it will have the advantage of large stable travel range up to 90% of the gap. As a
sensor the beam is to be driven into chaotic motion which is very sensitive changes in the
system parameters.
Two versions of the controller have been analyzed and implemented, one for the actuator
and one for the sensor. For the actuator, preliminary experiments show good matching
with the model. As for the sensor, the dynamic behavior have been studied and the best
operating regions have been determined.
| Identifer | oai:union.ndltd.org:WATERLOO/oai:uwspace.uwaterloo.ca:10012/5243 |
| Date | January 2010 |
| Creators | Seleim, Abdulrahman Saad |
| Source Sets | University of Waterloo Electronic Theses Repository |
| Language | English |
| Detected Language | English |
| Type | Thesis or Dissertation |
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