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Optimization of MEMS Microphone Size Parameters by BEM Sound Field Analysis and Taguchi Method

Since the micro-electro mechanical system microphone, MEMS microphone, has the advantages of superior sound quality, low power consumption, higher temperature resistance and anti-noise ability in used. The researchers therefore have studied the functions of MEMS microphone since 1980s. The MEMS microphones is applied as the part of 3G mobile phone in the market. Though the functions of microphone are improved by manufacturing process technique and new material designed, this study tends to provide a new, low-cost and rapid design idea to gain the performance in chamber of microphone. Taguchi method and BEASY software, which is boundary element method, are combined to evaluate the results of the design in sound field. Taguchi method is a famous method in industrial design to find out relations between system parameters and chamber size. BEASY is a tool for sound field analysis in the research. The result from Taguchi method appears the sound pressure level gain about 2.2 dB to 2.4 dB due to the change of microphone chamber size only. It is also interested in studying the optimization design for position of microphone. It is displayed that the location of port is closer to the boundary of chip will also increase about 0.3 dB to 0.6dB sound pressure level in sound field. The higher frequency of sound source will also create larger sound pressure level at two corners on the port.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-1124110-120358
Date24 November 2010
CreatorsYang, Ming-Ta
ContributorsShao-Yi Hsia, Yi-Cheng Huang, Shyue-Jian Wu, Bor-Tsun Wang, Shiuh-Kuang Yang
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-1124110-120358
Rightsnot_available, Copyright information available at source archive

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