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Modeling and Feedback Control of a MEMS Electrostatic Actuator

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Identiferoai:union.ndltd.org:OhioLink/oai:etd.ohiolink.edu:csu1247583924
Date28 July 2009
CreatorsEdwards, Jason
PublisherCleveland State University / OhioLINK
Source SetsOhiolink ETDs
LanguageEnglish
Detected LanguageEnglish
Typetext
Sourcehttp://rave.ohiolink.edu/etdc/view?acc_num=csu1247583924
Rightsunrestricted, This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.

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