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Implementation Issues on MEMS - A Study on System Identification

A nonlinear identification scheme is provided for a LTI-system with a feedback-nonlinearity, which depends on the input and LTI-system output. This is especially the case for MEMS, where the electrostatic field depends on the displacement and input voltage. The fact, that the algorithm only requires a matrix inversion and singular value decomposition, makes it possible to use the identification scheme for online-estimation. There is also no other a-priori knowledge about the system, except the order, needed.

Identiferoai:union.ndltd.org:DRESDEN/oai:qucosa.de:swb:ch1-200501442
Date28 October 2005
CreatorsWolfram, Heiko
ContributorsTU Chemnitz, Fakultät für Elektrotechnik und Informationstechnik
PublisherUniversitätsbibliothek Chemnitz
Source SetsHochschulschriftenserver (HSSS) der SLUB Dresden
LanguageEnglish
Detected LanguageEnglish
Typedoc-type:preprint
Formattext/html, application/pdf, application/x-gzip, text/plain, text/plain, text/plain, text/plain, text/plain, text/plain, text/plain, text/plain, application/zip

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