Synthesis of compliant single crystal silicon mechanisms with large deformation

Description

Zugl.: Freiburg (Breisgau), Univ., Diss., 2009

Links & Downloads

1. http://d-nb.info/995862664/04

Tags

Additional Fields

Identifer	oai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/466123112
Date	January 2009
Creators	Chen, Tzung-Ming
Publisher	Tönning Lübeck Marburg Der Andere Verl.
Source Sets	OCLC
Language	English
Detected Language	English