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Prediction of steady state response in dynamic mode atomic force microscopy and its applications in nano-metrology

Thesis (Ph. D.)--Ohio State University, 2005. / Title from first page of PDF file. Includes bibliographical references (p. 182-189).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/70122666
Date January 2005
CreatorsOh, Yunje,
PublisherColumbus, Ohio : Ohio State University,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceConnect to resource online

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