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CFD simulation of contact planarization

Thesis (M.S.)--University of Missouri--Rolla, 2007. / Vita. The entire thesis text is included in file. Title from title screen of thesis/dissertation PDF file (viewed March 25, 2008) Includes bibliographical references (p. 77-79).

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/213888751
Date January 2007
CreatorsVusirikala, Shanti,
PublisherRolla, Mo. : University of Missouri-Rolla,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
TypeElectronic books. Electronic dissertations.
SourceFreely available online

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