The goal of the thesis is to fabricate the integrated asymmetric Mach-Zehnder Interferometer and optical waveguide ring resonator with simple fabrication process. 1.41£gm and 1.49£gm symmetric quantum well InGaAlAs epitaxial wafer is used to fabricate the devices.
In the asymmetric Mach-Zehnder Interferometer , we design asymmetric straight waveguides with difference optical path differences £GL=480£gm, 970£gm, and 1900£gm. And asymmetric bend waveguides with curvature radius differences £GR=260£gm, 200£gm, 160£gm, and 100£gm. By this design, we can observe the interference variation of output light.
In optical waveguide ring resonator design, we reduce the length of original K=0.15 Multi-Mode Interference (MMI) by stepped-width waveguide. By three-stepped width waveguide MMI design, it can be reduced 33.2% length. We obtain different transmission spectrum by adjusting the splitting ratio of MMI couplers (K=0.85, 0.5, and 0.15) and cascading doudle rings. We use a series of two ring resonators by MMI (K0=0.5,K1=0.15,K2=0.5) to get the FSR=50GHz.
In fabrication process, we combined dry etching method with RIE-ICP and wet etching to get smooth sidewall and highly vertical waveguide. In measure , we get the FSR= 41.25 GHZ in throughput port
in double ring filters . No signal in drop port was obserred due to material absorption, bending loss, and waveguide loss.
| Identifer | oai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0730107-205502 |
| Date | 30 July 2007 |
| Creators | Lin, Cheng-Nan |
| Contributors | Wood-Hi Cheng, Tsong-Sheng Lay, Kuo-Jui Lin, Yi-Jen Chiu, Fow-Sen Choa |
| Publisher | NSYSU |
| Source Sets | NSYSU Electronic Thesis and Dissertation Archive |
| Language | Cholon |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | http://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0730107-205502 |
| Rights | not_available, Copyright information available at source archive |
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