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Development of a magnetic suspension system and its applications in nano-imprinting and nano-metrology

Thesis (Ph. D.)--Ohio State University, 2003. / Title from first page of PDF file. Document formatted into pages; contains x, 175 p.; also includes graphics (some col.) Includes bibliographical references (p. 170-175). Available online via OhioLINK's ETD Center

Identiferoai:union.ndltd.org:OCLC/oai:xtcat.oclc.org:OCLCNo/60553017
Date January 2003
CreatorsKuo, Shih-Kang,
Source SetsOCLC
LanguageEnglish
Detected LanguageEnglish
SourceConnect to this title online

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