Experimental and Computational Studies of Carbon Sputtering with Application to Deposition of Tetrahedrally Bonded Amorphous Carbon Films

Description

<p>JONSEN, DANIEL EVERETT. Experimental and Computational Studies of Carbon Sputtering with Application to Deposition of Tetrahedrally Bonded Amorphous Carbon Films. (Under the direction of Dr. Jerome J. Cuomo.) <p>In this work, amorphous carbon films are deposited on various substrates by ion beam sputtering of a graphite target. In addition, computational studies of the carbon sputtering process are performed using a molecular dynamics simulation program. In both cases, several process parameters are varied with the intent to find the optimum conditions for the sputter deposition of amorphous carbon films of high sp content amorphous carbon films.<P>

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1. http://www.lib.ncsu.edu/theses/available/etd-20010805-194422

Tags

Material Science and Engineering

Additional Fields

Identifer	oai:union.ndltd.org:NCSU/oai:NCSU:etd-20010805-194422
Date	07 August 2001
Creators	Jonsen, Daniel Everett
Contributors	Jerome J. Cuomo, Donald W. Brenner, Mohamed A. Bourham, Minor Rep., Gary L. Doll, Ronald O. Scattergood
Publisher	NCSU
Source Sets	North Carolina State University
Language	English
Detected Language	English
Type	text
Format	application/pdf
Source	http://www.lib.ncsu.edu/theses/available/etd-20010805-194422
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