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Reactive Sputtering Deposition and Characterization of Zinc Nitride and Oxy-Nitride Films for Electronic and Photovoltaic Applications

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Identiferoai:union.ndltd.org:OhioLink/oai:etd.ohiolink.edu:toledo1365165773
Date11 July 2013
CreatorsJiang, Nanke
PublisherUniversity of Toledo / OhioLINK
Source SetsOhiolink ETDs
LanguageEnglish
Detected LanguageEnglish
Typetext
Sourcehttp://rave.ohiolink.edu/etdc/view?acc_num=toledo1365165773
Rightsunrestricted, This thesis or dissertation is protected by copyright: all rights reserved. It may not be copied or redistributed beyond the terms of applicable copyright laws.

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