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SIMOX BOX metrology : using physical and electrical characterization

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. / Vita. / Includes bibliographical references (p. 47-49). / by Jung Uk Yoon. / M.S.

Identiferoai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/32682
Date January 1995
CreatorsYoon, Jung Uk, 1971-
ContributorsJames E. Chung, Carl V. Thompson II., Massachusetts Institute of Technology. Dept. of Materials Science and Engineering
PublisherMassachusetts Institute of Technology
Source SetsM.I.T. Theses and Dissertation
LanguageEnglish
Detected LanguageEnglish
TypeThesis
Format50 p., 2755706 bytes, 2756265 bytes, application/pdf, application/pdf, application/pdf
RightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission., http://dspace.mit.edu/handle/1721.1/7582

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