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Electrochemical and photoelectrochemical micromachining of silicon in HF electroytes

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1994. / Includes bibliographical references (p. 219-228). / by Richard Mlcak. / Sc.D.

Identiferoai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/37526
Date January 1994
CreatorsMlcak, Richard
ContributorsHarry L. Tuller., Massachusetts Institute of Technology. Dept. of Materials Science and Engineering
PublisherMassachusetts Institute of Technology
Source SetsM.I.T. Theses and Dissertation
LanguageEnglish
Detected LanguageEnglish
TypeThesis
Format228 p., application/pdf
RightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission., http://dspace.mit.edu/handle/1721.1/7582

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