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Study of gold diffusion kinetics in p/p+ epitaxial silicon

Thesis (B.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1998. / Includes bibliographical references (leaf 34). / by Edward C. Wu. / B.S.

Identiferoai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/10146
Date January 1998
CreatorsWu, Edward C. (Edward Chang-Hung), 1976-
ContributorsLionel C. Kimerling., Massachusetts Institute of Technology. Dept. of Materials Science and Engineering
PublisherMassachusetts Institute of Technology
Source SetsM.I.T. Theses and Dissertation
LanguageEnglish
Detected LanguageEnglish
TypeThesis
Format35, [9] leaves, 2447293 bytes, 2447054 bytes, application/pdf, application/pdf, application/pdf
RightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission., http://dspace.mit.edu/handle/1721.1/7582

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