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Design of a CMOS compatible, athermal, optical waveguide / Design of a complementary metal oxide semiconductor compatible, athermal, optical waveguide

Thesis (S.B.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2007. / Includes bibliographical references (p. 49). / This paper explores a possible design for a CMOS compatible, athermal, optical waveguide. The design explored is a slot waveguide with light guided in the low index material. A design paradigm is proposed which shows the relationship between cross-sectional parameters and their impact on both the effective index of refraction and the thermo-optic coefficient of the device. Two materials choices were explored to serve as the low index material, poly(ether imide) (PI) and poly(methyl methacrylate) (PMMA). The slot waveguide with PI as the low index material had a simulated, device thermo-optic coefficient of -8.5 x 10-4K-1, and the slot waveguide with PMMA as the low index material had a simulated, device thermo-optic coefficient of 1.7 x 10-5K-1. / by Luis Enrique Fernandez. / S.B.

Identiferoai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/44819
Date January 2007
CreatorsFernandez, Luis Enrique, S.B. Massachusetts Institute of Technology
ContributorsLionel C. Kimerling., Massachusetts Institute of Technology. Dept. of Materials Science and Engineering., Massachusetts Institute of Technology. Dept. of Materials Science and Engineering.
PublisherMassachusetts Institute of Technology
Source SetsM.I.T. Theses and Dissertation
LanguageEnglish
Detected LanguageEnglish
TypeThesis
Format49 p., application/pdf
RightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission., http://dspace.mit.edu/handle/1721.1/7582

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