Thesis (M.Eng.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2002. / Includes bibliographical references (p. 85-89). / An investigation was completed to assess the viability of a group of metallic microfabrication techniques aimed at the production of microelectromechanical systems (MEMS) This undertaking was done to show which methods hold the most promise for the near future. The methods investigated include LIGA, micromilling, jet molding, three dimensional printing, microcasting, micro-injection molding, metal injection molding, Microforming, and microextrusion. This study presents a technique overview, assembly issues, an applications survey, basic cost modeling and a survey of the relevant intellectual property. / by Abel Z. Hastings. / M.Eng.
| Identifer | oai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/8460 |
| Date | January 2002 |
| Creators | Hastings, Abel Z., 1973- |
| Contributors | Merton C. Flemings., Massachusetts Institute of Technology. Dept. of Materials Science and Engineering., Massachusetts Institute of Technology. Dept. of Materials Science and Engineering. |
| Publisher | Massachusetts Institute of Technology |
| Source Sets | M.I.T. Theses and Dissertation |
| Language | English |
| Detected Language | English |
| Type | Thesis |
| Format | 89 p., 7583779 bytes, 7583534 bytes, application/pdf, application/pdf, application/pdf |
| Rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission., http://dspace.mit.edu/handle/1721.1/7582 |
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