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Design and prototype fabrication of a manipulator for semiconductor test equipment

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996. / by Robert Ryan Vallance. / M.S.

Identiferoai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/40216
Date January 1996
CreatorsVallance, Robert Ryan
ContributorsAlexander H. Slocum., Massachusetts Institute of Technology. Dept. of Mechanical Engineering
PublisherMassachusetts Institute of Technology
Source SetsM.I.T. Theses and Dissertation
LanguageEnglish
Detected LanguageEnglish
TypeThesis
Format162 p., application/pdf
RightsM.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission., http://dspace.mit.edu/handle/1721.1/7582

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