Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2003. / Includes bibliographical references (p. 134-136). / A novel, low-cost positioning stage was constructed using a six-axis compliant mechanism driven by three two-axis electromagnetic actuators. The mechanism's monolithic, planar geometry is easily fabricated with low-cost manufacturing processes (such as waterjet machining). The manipulator tolerates ±1 mm actuator misalignment with less than 0.1% full-scale position error. Measurements over a 100x100x100 nm3 work volume displayed resolution better than the sensing capability, 5nm, and open-loop linearity errors less than 0.005% of the full-scale range (100 [mu]m). Measurements over a 100x100x100 [mu]m3 work volume exhibited linearity errors less than 0.20% full-scale. The mechanism's equilateral symmetry and planar geometry restricted thermal drift rates at start-up to 23nm and 4 [mu]tradians over 30 minutes and 0.1°C temperature change. The manipulator, built for $ 2000 (excluding electronics), was successfully tested in a fiber optic alignment application. / by Gordon A.B. Anderson. / S.M.
| Identifer | oai:union.ndltd.org:MIT/oai:dspace.mit.edu:1721.1/17585 |
| Date | January 2003 |
| Creators | Anderson, Gordon A. B. (Gordon Alexander Brewster), 1977- |
| Contributors | Martin Culpepper., Massachusetts Institute of Technology. Dept. of Mechanical Engineering., Massachusetts Institute of Technology. Dept. of Mechanical Engineering. |
| Publisher | Massachusetts Institute of Technology |
| Source Sets | M.I.T. Theses and Dissertation |
| Language | English |
| Detected Language | English |
| Type | Thesis |
| Format | 151 p., 4168173 bytes, 4167982 bytes, application/pdf, application/pdf, application/pdf |
| Rights | M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission., http://dspace.mit.edu/handle/1721.1/7582 |
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