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Development of an Innovative Micro Capacitive Humidity Sensor with Double Polyimide Thin Films and Interlacing Out-of-plane Electrodes

Polyimide thin films have been widely used in microelectronic and Micro-Electro-Mechanical System applications due to their many excellent characteristics including low dielectric constant, easy processing, good step coverage ability, high heat resistance and chemical resistance.
This paper presents the design, fabrication and complete characterization of an innovative capacitive relative humidity (RH) microsensor. The double polyimide thin films adopted in this study function as a capacitance sensing layer and a protecting layer of top electrodes respectively. To improve the humidity sensitivity and responding speed, interlacing out-of-plane electrodes are designed in the RH microsensor. The higher sensitivity ( 1.25 pF/¢HRH ), optimized sensing linearity ( 99.968¢H ) , very low hysteresis ( 0.24 ¢HRH ), excellent stability ( 1.36 ¢HRH ) , high accuracy ( ¡Ó 1.12 ¢HRH ) and fast response ( within 1 seconds ) characteristics of the RH microsensor have been demonstrated in this thesis.

Identiferoai:union.ndltd.org:NSYSU/oai:NSYSU:etd-0721106-213958
Date21 July 2006
CreatorsLi, Yao-Yu
ContributorsI-Yu Huang, Ruey-Shing Huang, Jiu-Chem Chiou, Shiang-Hwua Yu, Lieh-Hsi Lo
PublisherNSYSU
Source SetsNSYSU Electronic Thesis and Dissertation Archive
LanguageCholon
Detected LanguageEnglish
Typetext
Formatapplication/pdf
Sourcehttp://etd.lib.nsysu.edu.tw/ETD-db/ETD-search/view_etd?URN=etd-0721106-213958
Rightscampus_withheld, Copyright information available at source archive

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