This diploma thesis describes the design of a device for measuring stress in thin films – laser deflectometer, realization of its design and its experimental testing. The thesis is divided into five chapters. The first chapter deals with the stress in thin films and its influence on substrate – thin film system. The second chapter provides an overview of devices widely used for measuring stress in thin films and describes some their advantages and disadvantages. In the third chapter some design possibilities of the device are presented. The final solution of device called deflectometr is introduced in the fourth chapter. The last chapter includes the functional testing the device.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:254340 |
| Date | January 2016 |
| Creators | Šustek, Štěpán |
| Contributors | Klapetek,, Petr, Ohlídal, Miloslav |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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